Here you will find presentations given at COMSOL Conferences around the globe. The presentations explore the innovative research and products designed by your peers using COMSOL Multiphysics. Research topics span a wide array of industries and application areas, including the electrical, mechanical, fluid, and chemical disciplines. Use the Quick Search to find presentations pertaining to your application area.

Experimentally Matched Finite Element Modeling of Thermally Actuated SOI MEMS Micro-Grippers Using COMSOL Multiphysics

M. Guvench[1], and J. Crosby[1]
[1]University of Southern Maine, Gorham, Maine, USA

In “Micro-Electro-Mechanical-Systems” shortly known as MEMS, one of the most important and effective principle of creating transduction of electrical power to displacement force is thermal expansion. A slim beam of MEMS material, typically Silicon, is heated by the application of electrical current via Joule heating; it expands and creates motion. In the design of many MEMS devices ...

A Methodology For The Simulation Of MEMS Spiral Inductances Used As Magnetic Sensors

S. Druart, D. Flandre, and L.A. Francis
Université catholique de Louvain - ICTEAM, Louvain-la-Neuve, Belgium

In this paper, a methodology to simulate the electric behavior of spiral inductances is presented and discussed. All the methodology is built with the COMSOL software used with the Matlab scripting interface and then allows performing fully parameterized simulations. The program architecture is explained and is used to simulate two applications. The first calculates the voltage induced by an ...

A Wide Range MEMS Vacuum Gauge Based on Knudsen’s Forces

V. Sista, and E. Bhattarchaya
Microelectronics and MEMS Lab
Department of Electrical Engineering
Indian Institute of technology Madras
Chennai, India

A MEMS based Knudsen’s pressure gauge working in the range of 1e-5 mbar to 10 mbar is designed and simulated in COMSOL. The working principle is based on Knudsen’s forces that arise when two plates are held at different temperatures and their separation is comparable to the mean free path of the ambient gas molecules. The forces change the separation between the plates and capacitance between ...

Simulation of Thermal Sensor for Thermal Control of a Satellite using COMSOL

G. Mangalgiri
BITS Pilani
K K BIRLA GOA CAMPUS
Zuarinagar, Goa
India

Spacecrafts have a prime necessity that their temperature be controlled. This paper presents the simulation of a mechanically actuated field effect transistor that is used in a thermal system. It comprises of a composite beam, a piezoelectric substrate and a field effect transistor. The temperature rise causes a deflection in the composite beam thereby causing it to impinge on the piezoelectric ...

Empirical Model Dedicated to the Sensitivity Study of Acoustic Hydrogen Gas Sensors Using COMSOL Multiphysics®

A. Ndieguene[1], I. Kerroum[1], F. Domingue[1], A. Reinhardt[2]
[1]Laboratoire des Microsystèmes et de Télécommunications/Université du Québec à Trois-Rivières, Trois-Rivières, QC, Canada
[2]Laboratoire d’Électronique et des Technologies de l’Information, CEA, LETI Grenoble, France

Due to the increasing demand for hydrogen gas sensors for applications such as automation, transportation, or environmental monitoring, the need for sensitive and reliable sensors with a short response time is increasing. This paper presents an empirical model that studies the sensitivity of acoustic hydrogen gas sensors. A parametric study based on the variation of physical properties of ...

MEMS Based Tactile Sensors for Robotic Surgery

V. Nivethitha[1], S. P. Rakavi[1], K. C. Devi[1]
[1]PSG College Of Technology, Coimbatore, Tamil Nadu, India

In this work, a piezoelectric tactile sensor will be designed and simulated using COMSOL Multiphysics®. The sensor is designed in order to assess the pressure exerted on the human body while the robotic surgery is performed. The sensor consists of a rigid and compliant cylindrical element. A circular PDMS (Polydimethylsiloxane) film is sandwiched between the rigid cylinder and the base plate to ...

Effect of Fluid Conditions on Air-Liquid Interface in Hydrophobic Micro Textured Surface

S. Takahashi[1], S. Ogata[1]
[1]Tokyo Metropolitan University Hachioji City, Tokyo, Japan

We studied the influence of a number of gas-liquid interface on the drag reduction effect by numeric simulation. Level set method was used for an analysis of gas-liquid interface. The analytic model is rectangular channel of height h = 5 micrometer and width w = 20 micrometer with two hydrophobic microstructures in bottom of channel. In this channel, we found that the liquid penetrates in the ...

FEM Analysis of MEMS Capacitive Presure Sensor with Segmented Boss Structure for Diaphragm

A. K. Ramesh [1], P. Ramesh [1],
[1]College of Engineering Munnar, Munnar, Kerala, India

Microelectromechanical system (MEMS) based capacitive pressure sensor designs with improved sensitivity is always a matter of great concern and the recent developments in such a design is the MEMS capacitive pressure sensor with bossed diaphragm.The bossed diaphragm model improves sensitivity but it compromises the range of operation which lead to a new design with the segmented boss structure. ...

Design and Analysis of Stacked Micromirrors

S. Park, S. Chung, and J. Yeow

University of Waterloo, Systems Design Engineering, Waterloo, Ontario, Canada

A micromirror or a torsional actuator in general has been proven to be one of the most popular actuators fabricated by Micro-Electro-Mechanical System (MEMS) technology in many industrial and biomedical applications such as RF switches, a laser scanning display, an optical switch matrix, and biomedical image systems. In this paper, two stacked micromirrors are presented and analyzed to show ...

VLSI Layout Based Design Optimization of a Piezoresistive MEMS Pressure Sensors using COMSOL Multiphysics

R. Komaragiri[1], Sarath. S.[1], N. Kattabomman[1]
[1]NIT Calicut, Kozhikode, Kerala

This paper focuses on the diaphragm design and optimization of a piezoresistive Micro Electro Mechanical System (MEMS) pressure sensor by considering Very Large Scale Integration (VLSI) layout schemes. The aim of these studies is to find an optimal diaphragm shape by Finite Element Method (FEM) using COMSOL®, which is most suitable for VLSI layout. Optimal diaphragm shape is a diaphragm shape ...