L. Sujatha, D. K. Balasubramanian, V. S. Selvakumar
Rajalakshmi Engineering College, Chennai, India
University of Central Florida, Orlando, Florida, United States
Micro Mirror is a versatile device which has been gaining popularity and also the importance of MEMS techniques to develop such devices. These mirrors find applications in fields such as optical switching, display and in medical fields for non-invasive imaging. A thermally actuated mirror moves in either vertical or horizontal directions for the given orientation. The ends of thermal actuators ...
M. J. Hancock, N. H. Elabbasi, M. C. Demirel
Veryst Engineering, LLC., Needham, MA, USA
Pennsylvania State University, University Park, PA, USA
Pumping liquids at small scales is challenging because of the principle of reversibility: in a viscous regime, the flow streamlines through a fixed geometry are the same regardless of flow direction. Recently we developed a class of microfluidic pump designs based on tilted flexible structures that combines the concepts of cilia (flexible elastic elements) and rectifiers (e.g., Tesla pump). We ...
O. Myers , M. Anjanappa , and C. Freidhoff 
 Mississippi State University, Mississippi State, MS, USA
 University of Maryland Baltimore County, Baltimore, MD, USA
 Northrop Grumman Corporation, Electronics Systems Sector, Baltimore, MD, USA
This paper presents a methodology towards designing, analyzing and optimizing piezoelectric interdigitated microactuators using COMSOL Multiphysics. The models used in this study were based on a circularly interdigitated design that takes advantage of primarily the d33 electromechanical piezoelectric constant coefficient. Because of the symmetric nature of the devices, 2D axisymmetric models ...
S. Suganthi, M. Anandraj, and L. Sujatha
Department of Electronics & Communication Engineering, Rajalakshmi Engineering College, Chennai, India
Department of Physics, Rajalakshmi Engineering College, Chennai, India
Porous Silicon (PS) can easily be formed by electrochemical etching of silicon in HF based electrolytes at room temperature. Since, PS is compatible with silicon IC technology; it finds lot of applications in the fabrication of MEMS devices. In the current study, we discuss the design of a condenser microphone using a Silicon/ Porous Silicon composite membrane as a movable plate. The performance ...
S. Druart, D. Flandre, and L.A. Francis
Université catholique de Louvain - ICTEAM, Louvain-la-Neuve, Belgium
In this paper, a methodology to simulate the electric behavior of spiral inductances is presented and discussed. All the methodology is built with the COMSOL software used with the Matlab scripting interface and then allows performing fully parameterized simulations. The program architecture is explained and is used to simulate two applications. The first calculates the voltage induced by an ...
Optimized Cantilever-to-Anchor Configurations of Buckled Cantilever Plate Structures for Transducer Applications
A. Arpys Arevalo Carreno, D. Conchouso Gonzalez, I.G. Foulds
King Abdullah University of Science and Technology, Thuwal, Mecca, Kingdom of Saudi Arabia
The mechanical simulation and analysis of the cantilever-to-anchor configuration for an out-of-plane structure used in transducer applications is reported. The polymer-based Buckled Cantilever Plate “BCP” structure, gives the ability to orient an active device from a horizontal to a vertical position, once assembled. In this paper we compare four different cantilever-to-anchor configurations: ...
C. Tonry, M. K. Patel, C. Bailey, M. P.Y. Desmuliez, W. Yu
Computational Mechanics and Reliability Group (CMRG), School of Computing and Mathematical Sciences, University of Greenwich, London, United Kingdom
Microsystems Engineering Centre (MISCEC, School of Engineering & Physical Sciences, Heriot Watt University, Earl Mountbatten Building, Edinburgh, United Kingdom
State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, Jilin, China
Electric Field Assisted Capillarity (EFAC) is a novel technique for the fabrication of hollow polymer microstructures. It has advantages over current methods as it is a single step process. Hollow microstructures have many uses in industry from microchannels and microcapsules in BioMEMS to fibre-optical waveguides. It makes use of the dielectric properties of polymers combined with a heavily ...
G. Zhang, S. Bearden
Clemson University, Clemson, SC, USA
It is necessary to understand and control nanopore behavior in order to develop biosensors for a variety of applications including DNA sequencing. The fluidics of nanopore devices we fabricated exhibits a range of interesting phenomena, such as enhanced conductance and current rectification. By electrically biasing nanopores, we were able to actively control the nanopore conductance in real time ...
D. Kappe, A. Hütten
Bielefeld University, Bielefeld, Germany
Designing and constructing a lab-on-a-chip device poses a variety of questions. Transport of all required substances, detection of the analyte and its deposition on a sensor have to be incorporated. Different strategies have been developed to achieve good coverages of the sensor, like employing electric or magnetic gradients. On the basis of a ramp like structure, the binding of the analyte to a ...
N. Qudus, T. Mahbub, S. A. Ali, and M. Shajahan
 Bangladesh University of Engineering and Technology, Dhaka Bangladesh
A finite element model is employed to describe the electric potential distribution and electroosmotic flow field inside a wavy cylindrical channel. The model uses coupled Laplace and Poisson-Boltzmann to evaluate the electric potential distribution inside the channel. It also contains continuity and Navier–Stokes equations for the solution of fluid flow. A particle trajectory model was ...