N. Osonwanne, and J.V. Clark
Purdue University, West Lafayette, IN, USA
In this paper we present a method to reduce the comb drive gap in micro electro mechanical systems (MEMS) beyond the minimum fabrication feature size. The benefit of reducing the gap space between comb drive fingers is to increase its sensitivity to changes in capacitance due to displacements. The minimum feature size of standard fabrication foundries is 2 microns. To reduce the gap beyond a ...
R. Dufour , C. Wu, F. Bendriaa, V. Thomy, and V. Senez
BioMEMS Group, IEMN, University of Lille Nord de France, Villeneuve d’Ascq, France
This paper presents an Analog to Digital Microfluidic Converter (ADMC) using passive valves and enabling the conversion of a continuous liquid flow into droplets for Electro-Wetting On Dielectric (EWOD) actuation. Valves calibration, geometry characteristics and losses reduction have been optimized using microfluidic application mode of COMSOL Multiphysics®.
Middle East Technical University
In this study, a detailed finite element model coupling the motion dynamics and electromagnetics of a diaphragm based MEMS vibration energy harvester is presented. The energy harvester converts low frequency vibrations to high frequency response by magnetic actuation of a diaphragm carrying coils. AC/DC, Solid Mechanics and Moving Mesh (ALE) modules are coupled together in one 3-D model to ...
I.M. Abdel-Motaleb, J. Lavrencik 
Department of Electrical Engineering, Northern Illinois University, DeKalb, IL, USA
There is urgent need to monitor dental and oral diseases, such as tooth decay, gum diseases, and teeth grinding. Such monitoring can be achieved by embedding sensors in the mouth. This technique faces some difficulties. The first is how the power needed for the operation of the sensors and the associated electronic chips can be generated. This power can be generated using the pressure exerted by ...
C. Grau Turuelo, B. Bergmann, C. Breitkopf
Technische Universität Dresden, Dresden, Germany
The void shape evolution of a trench patterned silicon substrate results in diverse cavities by varying initial conditions. The size and the arrangement of the initial trenches are decisive for the transformation process besides the annealing conditions which are, in fact, time and temperature, and the existing pressure values. The prediction of the shape evolution depending on different ...
H. Cabrera, D.A. Zanin, L.G. De Pietro, A. Vindigni, U. Ramsperger, D. Pescia
Laboratory for Solid State Physics, ETH Zurich, Zurich, Switzerland
A sharp tip approached perpendicular to a conducting surface at subnanometer distances and biased with a small voltage builds a junction across which electrons can be transferred from the tip apex to the nearest surface atom by direct quantum mechanical tunneling. Such a junction is used e.g. in Scanning Tunneling Microscopy (STM). When the distance d between tip and collector is increased ...
J. Vijitha, S. S. Priya, K. C. Devi
PSG College of Technology, Coimbatore, Tamil Nadu, India
Sleep apnea is a type of sleep disorder characterized by pauses in breathing or instances of shallow or infrequent breathing during sleep. There is a need to diagnose sleep apnea since it leads to fluctuations in the oxygen level that in turn affect the heart rate and blood pressure. In order to detect this disorder, a Micro Electro Mechanical System (MEMS) based piezoelectric pressure sensor ...
L. Weber , L. Fromme , D. Zielke ,
 University of Applied Sciences Bielefeld, Department of Engineering Sciences and Mathematics, Bielefeld, Germany
 University of Applied Sciences Bielefeld, Institute BIFAM, Bielefeld, Germany
Piezo buzzers, made of piezoelectric material glued on a brass plate, are usually used as signaler, but the buzzer can also be used to convert mechanical into electrical energy. If acceleration influences the buzzer, the structure is bent by its mass and a voltage can be measured between the connection pads. With a small, additional weight on the buzzer the useable electrical energy becomes ...
A. Dwivedi , G. Khanna ,
 National Institute of Technology Hamirpur, Himachal Pradesh, India
The hearing impairment is affecting more than 360 million people all over the world.In India alone, 63 million people suffer from the significant auditory loss. Conventional hearing aids suffer from reliability, practicality and social stigma concerns. The totally implantable devices provide freedom from the social and practical difficulties of using conventional hearing aids. The paper presents ...
S. Logeshkumar, L. Lavanya, G. Anju, and M. Alagappan
PSG College of Technology
Tamil Nadu, India
In the model silicon nanorods are designed as cantilever array and coated with thin film of aluminum or aluminum nitride, to be characterized, thus, adding a detectable mass and altering the cantilever resistance to bending. The simulated results show that when films of different thickness are placed on the cantilever, there is a corresponding change in the resonant frequency and the ...