Two-fluid modelling of an abnormal low-pressure glow discharge

Low-pressure glow discharges are of topical interest for a lot of technological applications like plasma light sources, plasma processing for surface modification, and plasma chemistry. Therefore, a detailed understanding of the fundamental processes of glow discharges is required to e.g. optimize the discharge parameters in these plasma applications.

Theoretical investigations can help to realize this. The cathode region of glow discharges is of particular importance because the processes necessary for self-sustainment take place there. The essential properties of such nonisothermal plasmas are determined by the electrons which show a non-equilibrium behaviour in the discharge region close to the cathode. Hence, for a general investigation the electron component has to be treated on a microphysical basis.

In the present work a fluid-Poisson model to describe abnormal glow discharges in lowpressure plasmas is presented. In a further step these investigations have to be extended for a kinetic description of the electron component yielding their velocity distribution function.