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MEMS Electrostatic Comb Actuator: A Comparison of Different Structure Designs and Materials using COMSOL 3.5a

S. Kapoor[1], D. Aggarwal[2], and A. Gujjar[1]
[1]University Institute of Engineering and Technology, Kurukshetra University, Kurukshetra, Haryana, India.
[2]Electronics Science Department, University Institute of Engineering and Technology, Kurukshetra University, Haryana, India.

The micro machining technology that emerged in the late 1980’s can provide micron sized sensors and actuators. Actuators are used for the transformation of non- mechanical input energy into mechanical output energy. There are many types of micro- actuation mechanisms, most commonly used are piezoelectric, magnetic, thermal, SMA, electrochemical, electrostatic actuation. Electrostatic actuation is one of the most common force generation schemes.

Simulation for different 2D structures and materials is done using COMSOL3.5a as it provides advanced methods of solving moving boundaries with FEM.