Design and Modeling of a Micro-active Suspension

T. Verdot and M. Collet,
FEMTO-ST Institute, Dept of Applied Mechanics

Nowadays, lightweight materials are widely used to reduce weight and increase available space in moving structures such as cars or aircraft. However, they constitute an intense vibrating environment that can strongly affect the operation of embedded micro-transducers such as frequency generators or inertial sensors.

To alleviate this problem, we propose the concept of a Micro-Active Suspension (MAS). A MAS consists of a small suspension inserted between a sensitive component and its circuit board, into which sensors and actuators are integrated.

In this paper, we will present the COMSOL Multiphysics model of our MEMS device, taking into account the mechanical dynamics of the substrate and the electromechanical coupling in the piezoelectric layer.