Vibrating Micromirror with Viscous and Thermal Damping: Transient Behavior

Application ID: 49481

Micromirrors are used in certain MEMS devices to control optic elements. This example model illustrates a mirror that is initially actuated for a short time and then exhibits damped vibrations.

It simulates a vibrating micromirror surrounded by air and uses the Thermoviscous Acoustics, Transient, the Shell, and the Pressure Acoustics,