Fountain Flow Effects on Electrodeposition on a Rotating Wafer
Model ID: 13865
This example extends the analysis made in the model Electrodeposition on a Resistive Patterned Wafer by including the diffusion and convection of copper ions in the electrolyte.
The coupled mass transport convection-diffusion effects are of interest in this type of reactor since they will be accentuated towards the rim of the wafer, limiting the current density. This will counter balance the activation overpotential which is highest at the rim due to electric current conduction effects in the wafer. By the design of the reactor, the relation between mass transport and activation potential effects can be optimized to make the current distribution over the wafer more uniform.